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Solar Thin Film Photovoltaics
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Application US20190081199
Published 2019-03-14
Vapor Transport Deposition Method And System For Material Co-deposition
An improved feeder system and method for continuous vapor transport deposition that includes at least two vaporizers couple to a common distributor through an improved seal for separately vaporizing and collecting at least any two vaporizable materials for deposition as a material layer on a substrate. Multiple vaporizer provide redundancy and allow for continuous deposition during vaporizer maintenance and repair.
Much More than Average Length Specification
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USPTO Full Text Publication >
- 1. A vapor distributing unit comprising:
a vaporizer unit for vaporizing a powder material; a vapor housing for capturing material vapor from the vaporizer unit, wherein the vaporizer unit is within the vapor housing, and wherein the vapor housing further comprises a vapor housing outlet; a vapor distribution unit comprising an inlet channel for collecting vapor from the vaporizer unit, a chamber for collecting the material vapor captured by the vapor housing, and a chamber outlet for outputting the material vapor collected in the chamber along a base of the vapor distribution unit; a seal at the junction between an outer wall of the vapor housing and the vapor distribution unit, wherein the seal comprises:
a tubular section that extends from the outer wall of the vapor housing to flush with an inner wall of the vapor housing, the inner wall arranged opposite of the outer wall, the tubular section forming a continuous wall of the inlet channel and extending from the vapor housing to the chamber; and
a second section that extends away from the inlet channel into an annular space between the vapor housing and the vapor distribution unit.
