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Application US20210036678


Published 2021-02-04

Structures, Acoustic Wave Resonators, Devices And Systems To Sense A Target Variable, Including As A Non-limiting Example Corona Viruses

Techniques for improving Bulk Acoustic Wave (BAW) resonator structures are disclosed, including fluidic systems, oscillators and systems that may include such devices. A bulk acoustic wave (BAW) resonator may comprise a substrate and a first layer of piezoelectric material. The bulk acoustic wave (BAW) resonator may comprise a top electrode. A sensing region may be acoustically coupled with the top electrode of the bulk acoustic wave (BAW) resonator.



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USPTO Full Text Publication >

25 Independent Claims

  • 1. A fluidic system comprising: a substrate a Bulk Acoustic Wave (BAW) resonator arranged over the substrate, the BAW resonator including: a first layer of piezoelectric material; and a top electrode; and a sensing region acoustically coupled with the top electrode of the BAW resonator, in which a sensitivity of the fluidic system when the sensing region is exposed to fluid is within a range from approximately one half part per million per one hundred attograms to approximately fifty parts per million per one hundred attograms.

  • 2. (canceled)

  • 6. (canceled)

  • 7. (canceled)

  • 9. (canceled)

  • 10. (canceled)

  • 12. (canceled)

  • 14. (canceled)

  • 15. A Micro Electro Mechanical System (MEMS) comprising: a substrate; a Bulk Acoustic Wave (BAW) resonator arranged over the substrate, the BAW resonator including: a top electrode; a first layer of piezoelectric material having a first piezoelectric axis orientation; and a second layer of piezoelectric material having a second piezoelectric axis orientation substantially opposing the first piezoelectric axis orientation of the first layer of piezoelectric material; and a sensing region acoustically coupled with the top electrode of the BAW resonator.

  • 16-19. (canceled)

  • 21. (canceled)

  • 23. (canceled)

  • 26-29. (canceled)

  • 30. An apparatus comprising: a substrate; a Bulk Acoustic Wave (BAW) resonator arranged over the substrate, the BAW resonator including: a first layer of piezoelectric material; and a harmonically tuned top electrode.

  • 32. (canceled)

  • 34-36. (canceled)

  • 38. (canceled)

  • 42. A system comprising: a substrate; a Bulk Acoustic Wave (BAW) resonator arranged over the substrate, the BAW resonator including: a first layer of piezoelectric material and a top electrode; and a sensing region acoustically coupled with the top electrode of the BAW resonator, in which the top electrode is electrically and acoustically coupled with the first layer of piezoelectric material to excite a main resonant frequency of the BAW resonator coupled with the sensing region, and in which the main resonant frequency of the BAW resonator coupled with the sensing region is in a super high frequency band or an extremely high frequency band.

  • 46-48. (canceled)

  • 51. (canceled)

  • 52. (canceled)

  • 55-57. (canceled)

  • 59. (canceled)

  • 61-72. (canceled)

  • 74-151. (canceled)